SLI Series Datasheet by Sensirion AG

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SENSIRION 1 HE SENSOR COMPANY
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SLI Liquid Flow Meter Series
Media Isolated Microfluidic Flow Meter
Liquid flow rates up to 10 ml/min
Non-invasive measurement
Different interface options
40 ms flow detection response time
Product Summary Interface Options
The SLI Liquid Flow Meter enables fast, non-invasive
measurements of very low liquid flow in the µl/min- to
ml/min-range. Excellent chemical resistance is ensured:
The flow path of the SLI Liquid Flow Meter is formed by a
simple, straight glass capillary. The fourth generation
MEMS sensors combine a thermal high precision sensor
element with amplification circuits and digital intelligence
for linearization and temperature compensation on one
single microchip the products core element.
Digital
- I2C-Bus
- RS485-Bus
- USB Cable
Analog
- Voltage Output (0-10 V)
- Additional operation
modes
For more information on communication, please refer
to page 2 of this document.
1 Sensing Performance
Table 1: Model specific performance of SLI (all data for medium H2O, 23°C)
Parameter
SLI-0430
SLI-1000
SLI-2000
Unit
H2O Full scale flow rate
80
1000
5000
µl/min
H2O Sensor output limita
120
1100
5500b
µl/min
Accuracy below full scale
(whichever error is larger)
5.0
5.0
5.0
% of m.v.c
0.15
0.2
0.2
% of full scale
Repeatability below full scale
(whichever error is larger)
0.5
0.5
0.5
% of m.v.
0.01
0.02
0.02
% of full scale
Temperature coefficient
(additional error / °C; whichever is larger)
0.13
0.1
0.1
% m.v. / °C
0.003
0.004
0.004
% full scale / °C
Mounting orientation sensitivityd
<0.4
1.0
1.5
% of full scale
Flow detection response time 63
40
ms
Response time on power-up
120
ms
Operating temperature
+10…+50
°C
Ambient storage temperaturee
-10…+60
°C
Maximum recommended operating pressure
50
15
15
bar
Burst pressure
150
30
30
bar
a Flow rate at which the sensor output saturates. See section 2 for performance between full scale and saturation point
b Extended range up to 10500 µl/min, see section 2 for performance specifications
c Measured value
d Maximum additional offset when mounted vertically
e Non-condensing, flow path empty
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Table 2: Model specific performance of SLI (all data for medium IPA, 23°C)
Parameter
SLI-0430
SLI-1000
SLI-2000
Unit
IPA full scale flow rate
500
10’000
µl/min
80
ml/min
Sensor output limita
600
11’000
µl/min
90
ml/min
Accuracy below full scale
(whichever error is larger)
20
20
10
% of m.v.b
1
1
0.5
% of full scale
Repeatability below full scale
(whichever error is larger)
1
1
1.5
% of m.v.
0.05
0.05
0.03
% of full scale
Temperature coefficient
(additional error / °C; whichever is larger)
0.5
.5
0.4
0.35
% m.v. / °C
0.025
0.02
0.02
% full scale / °C
aFlow rate at which the sensor output saturates
bMeasured value
1.1 Calibration Field Information
The SLI Liquid Flow Meters hold calibrations for two liquids, one for water (H2O) and one for isopropyl alcohol (IPA).
Each calibration is stored on a separate calibration field (CF):
Calibration field 0: H2O (factory default)
Calibration field 1: IPA
Calibration field 2 (SLI-2000 only, starting from SN 1627-00000): H2O extended range
The default calibration field (i.e. the active calibration field at power up) can be permanently changed via I2C or
RS485 commands. Alternatively, the default calibration field can be changed using the USB-RS485 Sensor Viewer
which is part of the Liquid Flow Meter Kit and also available in the download center on the Sensirion liquid flow
webpage. www.sensirion.com/liquidflow-download
Accuracymarmezcmmam) Accuracymarmezcmmam) Accuracy (“/onlmeasured yams) 5% 5% 0% 40cm 15% 1 10V: 5% 0% SLl-Mifl Remiva Accuracy with H20 —m 2m — — M s’cmo'c chcscnmy ran 740 u an RU 120 Haw rate M’mm H20) SLl-1DDU Remiva Accuracy with H20 —m 2m — — M s’cmo'c chcscm 7500 a sun mun Haw rate M’mm H20) su-znnn Rclmc Accuracy with H70 (incl, Exland-d Rangu) SENSIRION THE sensor: COMPANY sLI-wu Abselute Accuracy with H20 E E a 3 , AIE‘CIW’C r ———-Repeeub1my 0001 ‘ 1 10 100 Flow ycye (“Hymn H20) sLM m Abselute Accuracy with H20 é —A( 23'c - - m a‘cwc Repeatamny Accuracy ("I/mm) 0 1 10 100 1000 F‘owvate (“Hymn H20) 5mm Accalucc Accurccy m ",0 fincl. Extended Range) Joann —mza'c I 3 — — me'cmo'c ’ E 5 “ —M23"C 1 _____ _-— — — ME’OMCI'C -Repemabl\ny 0 1 75000 U 5000 10000 100 1000 10000 F‘awratewh‘mm my flow rate tun/mm H20)
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2 Specifications Charts
Figure 1: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and
absolute error in µl/min (right column) for H2O
Mcuiacymarmezsmmam Mcuiacymarmezsmmam Mcuiacymarmezsmmam SLI-MSD Relative Acwrany with IPA — — At e’cmo'c 50o 7st u 250 50c: PIowvaIeRepedahmy some a PIowvaIe
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Figure 2: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and
absolute error in µl/min or ml/min in case of the SLI-2000 (right column) for IPA
VDD = 4—6 V, Pln 1 SDA (data) 2 GND 3 VDD 4 SCL (clock) Sensor Cable dalasheel, avallable on www.3ensirion.com/liguidflow-download SENSIRION 1 HE SENSOR COMPANY For funher lnlormallon please see the Sensor Cable dalasneet, available on www.sensiri com/llguldfiow-download For funher lnlormallon please see the Sensor Cable dalasneet, available on www.3ensirion.com/llguldflow-download
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3 Communication with the Sensor
The SLI flow meter shows bidirectional, linear transfer
characteristics. The product comes fully calibrated for
water and IPA.
Digital Sampling Time, 16 bit 74 ms
Digital Sampling Time, 9 bit 1 ms
3.1 Electrical Specifications
Table 3: DC Characteristics
Parameter
Conditions
Min.
Typ.
Max.
Units
Power Supply
DC, VDD
Sensor only
4
5
6
V
RS485 cable
4
5
6
V
Analog cable
12
24
36
V
Operating
Current
VDD = 4-6 V,
no load
5
5.5
6
mA
RS485 cable
20
70
mA
Analog cable
4.3
mA
3.2 Electrical Connector and Pinout
The flow meter is equipped with a male connector
type M8, 4-pin, threaded lock according to
IEC 61076-2-101 (Ed. 1)/ IEC 60947-5-2, and is
compatible with Sensirion’s SCC1 interface cables.
Table 3: Electrical pinout
Pin
1
SDA (data)
2
GND
3
VDD
4
SCL (clock)
3.3 Communication via USB cable
The Sensirion USB Sensor Cable provides an easy to
use USB Interface for laboratory and desktop use.
For further information please see the SCC1-USB
Sensor Cable datasheet, available on
www.sensirion.com/liquidflow-download.
3.4 Digital Communication via RS485-Bus
The SCC1-RS485 Sensor Cable for flow sensors
allows the communication via RS485 interface for use
in a demanding industrial automation environment. In
addition to the standard commands available in the
I²C interface of the sensor, the incorporated
microcontroller of the cable provides more complex
logic such as a dispense volume totalizer, automatic
dispense detection, automatic heater control and data
buffer for asynchronous read-out.
For further information please see the SCC1-RS485
Sensor Cable datasheet, available on
www.sensirion.com/liquidflow-download.
3.5 Analog Communication
The SCC1-ANALOG Sensor Cable allows simple and
quick readout of Sensirion’s liquid flow meters by
converting the digital sensor reading to a 0...10.5 V
analog voltage output. Additionally, a digital (high/low)
output with two different modes of operation is
available (Flow Switch / Volume Counter)
For further information please see the SCC1-USB
Sensor Cable datasheet, available on
www.sensirion.com/liquidflow-download.
3.6 Digital Communication via I²C-Bus
Digital communication between a master and the SLI
sensor runs via the standard I²C-interface. The
physical interface consists of two bus lines, a data line
(SDA) and a clock line (SCL) which need to be
connected via pull-up resistors to the bus voltage of
the system.
These lines can be used on 3.3V or 5.0V level with a
clock frequency of 100 kHz. For the detailed
specifications of this I²C communication, please refer
to specific I²C Application Notes from Sensirion.
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4 Fluidic Connection
Table 5: Fluidic Specifications and Pressure Rating
Parameter
SLI-0430
SLI-1000
SLI-2000
Wetted Materials:
Internal sensor tube material
Quartz Glass
(Fused Silica)
Borosilicate Glass 3.3
Fitting material
PEEK
Sealing material
None
FEP
Fluid connector ports (Fittings)
¼-28 flat-bottom for 1/16” or 1/8” OD plastic tubinga
Pressure drop (at full scale flow rate, H2O, 23°C)
1 mbar
<1 mbar
<1 mbar
Pressure drop (at full scale flow rate, IPA, 23°C)
7 mbar
5 mbar
2 mbar
Total internal volume
5 µl
25 µl
80 µl
a1/8” OD tubing with 2 mm minimum ID is recommended for the SLI-2000.
For more information on the fluidic connection please find: “Application Note Sensor Ports and Tubing Connections” in the
Download Center on our webpage (www.sensirion.com/liquidflow-download).
5 Mechanical Specifications
Table 6: Mechanical Specifications
Parameter
SLI-0430
SLI-1000
SLI-2000
Largest dimensions
58 x 42.5 x 20 mm
Total mass
53 g
Inner diameter d
430 µm
1.0 mm
1.8 mm
Protection class
IP 65
All dimensions in mm
SLI-0430
SLI-1000 / SLI-2000
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6 Ordering Information
For OEM applications, the liquid flow meter can be
purchased in larger quantities without any additional
parts. For optimum performance, Sensirion
recommends using the SLI liquid flow meters in
combination with the SCC1 interface cables.
For laboratory use and technology evaluation, the
Liquid Flow Meter Kit SLI-XXXX can be ordered.
This laboratory-package contains:
Liquid Flow Meter SLI-XXXX
Fitting Material for 1/8’’ tubing
PC Software (Viewer & Data Export Tool)
SCC1-USB Sensor Cable with USB connector
for plug-and-play connection to a PC
SCC1-Analog Sensor Cable with 0-10 V voltage
output.
Table 9: Ordering information
Product
Article Number
SLI-0430 Liquid Flow Meter
1-100836-02
SLI-1000 Liquid Flow Meter
1-100835-01
SLI-2000 Liquid Flow Meter
1-100895-01
Flow Meter Kit SLI-0430
1-100893-01
Flow Meter Kit SLI-1000
1-100879-01
Flow Meter Kit SLI-2000
1-100894-01
Interface Cables:
SCC1-RS485 Sensor Cable Pigtail 2m
1-100804-01
SCC1-RS485 Sensor Cable Pigtail 5m
1-101122-01
SCC1-ANALOG Sensor Cable Pigtail 2m
1-101072-01
SCC1-ANALOG Sensor Cable Pigtail 10m
1-101219-01
SCC1-USB Sensor Cable 2m
1-101007-01
SENSIRION THE SENSOR COMPANY CE SENSIRION AG Sensirion Inc., USA Sensirion Korea Co. Ltd. phone: +1 805 409 490 phone: +82 31 337 77 info-us@sensirion.com 1nfo-kr@sensirion.com S www.5ensirion.com www.5ensirion.co.kr phon +41 44 305 4 Sensirion Japan Co. Ltd Sensirion China Co. Ltd. fax: +41 44 305 phone: +81 3 3444 494 phone: +86 755 8252 1 info@sensirion.com info-'Q@sensir10n.com 1nfo-cn@sensirion.com www.sensirion.com www.5ensirion.co.'p www.5ensirion.com.cn Sensirion Taiwan Co. Ltd. info@sensirion.com www.sens' ' com com/contact
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Important Notices
Warning, personal injury
Do not use this product as safety or emergency stop devices or in any
other application where failure of the product could result in personal
injury (including death). Do not use this product for applications other
than its intended and authorized use. Before installing, handling,
using or servicing this product, please consult the datasheet and
application notes. Failure to comply with these instructions could
result in death or serious injury.
If the Buyer shall purchase or use SENSIRION products for any unintended
or unauthorized application, Buyer shall defend, indemnify and hold
harmless SENSIRION and its officers, employees, subsidiaries, affiliates
and distributors against all claims, costs, damages and expenses, and
reasonable attorney fees arising out of, directly or indirectly, any claim of
personal injury or death associated with such unintended or unauthorized
use, even if SENSIRION shall be allegedly negligent with respect to the
design or the manufacture of the product.
ESD Precautions
The inherent design of this component causes it to be sensitive to
electrostatic discharge (ESD). To prevent ESD-induced damage and/or
degradation, take customary and statutory ESD precautions when handling
this product.
Warranty
SENSIRION warrants solely to the original purchaser of this product for a
period of 12 months (one year) from the date of delivery that this product
shall be of the quality, material and workmanship defined in SENSIRION’s
published specifications of the product. Within such period, if proven to be
defective, SENSIRION shall repair and/or replace this product, in
SENSIRION’s discretion, free of charge to the Buyer, provided that:
notice in writing describing the defects shall be given to SENSIRION
within fourteen (14) days after their appearance;
such defects shall be found, to SENSIRION’s reasonable satisfaction,
to have arisen from SENSIRION’s faulty design, material, or
workmanship;
the defective product shall be returned to SENSIRION’s factory at the
Buyer’s expense; and
the warranty period for any repaired or replaced product shall be
limited to the unexpired portion of the original period.
This warranty does not apply to any equipment which has not been installed
and used within the specifications recommended by SENSIRION for the
intended and proper use of the equipment. EXCEPT FOR THE
WARRANTIES EXPRESSLY SET FORTH HEREIN, SENSIRION MAKES
NO WARRANTIES, EITHER EXPRESS OR IMPLIED, WITH RESPECT TO
THE PRODUCT. ANY AND ALL WARRANTIES, INCLUDING WITHOUT
LIMITATION, WARRANTIES OF MERCHANTABILITY OR FITNESS FOR
A PARTICULAR PURPOSE, ARE EXPRESSLY EXCLUDED AND
DECLINED.
SENSIRION is only liable for defects of this product arising under the
conditions of operation provided for in the datasheet and proper use of the
goods. SENSIRION explicitly disclaims all warranties, express or implied,
for any period during which the goods are operated or stored not in
accordance with the technical specifications.
SENSIRION does not assume any liability arising out of any application or
use of any product or circuit and specifically disclaims any and all liability,
including without limitation consequential or incidental damages. All
operating parameters, including without limitation recommended
parameters, must be validated for each customer’s applications by
customer’s technical experts. Recommended parameters can and do vary
in different applications.
SENSIRION reserves the right, without further notice, (i) to change the
product specifications and/or the information in this document and (ii) to
improve reliability, functions and design of this product.
Copyright © 2001-2016, SENSIRION.
CMOSens® is a trademark of Sensirion
All rights reserved
CE, RoHS, REACH and WEEE Statement
The flow meters of the SLI series comply with requirements of the following
directives and regulations:
The device fully complies with norm EN 50081-2 (Emission Test
Series), EN 50082-2 (Immunity Test Series) and ESD protection when
used in combination with the SCC1-RS485 or SCC1-ANALOG Sensor
Cables.
EU Directive 1907/2006/EC concerning Registration, Evaluation,
Authorization and Restriction of Chemicals (REACH)
EU Directive 2002/96/EC on waste electrical and electronic equipment
(WEEE), OJ13.02.2003; esp. its Article 6 (1) with Annex II.
EU Directive 2002/65/EC on the restriction of certain hazardous
substances in electric and electronic equipment (RoHS), OJ01.01.2011
Headquarters and Subsidiaries
SENSIRION AG
Laubisruetistr. 50
CH-8712 Staefa ZH
Switzerland
phone: +41 44 306 40 00
fax: +41 44 306 40 30
info@sensirion.com
www.sensirion.com
Sensirion Inc., USA
phone: +1 805 409 4900
info-us@sensirion.com
www.sensirion.com
Sensirion Japan Co. Ltd.
phone: +81 3 3444 4940
info-jp@sensirion.com
www.sensirion.co.jp
Sensirion Korea Co. Ltd.
phone: +82 31 337 7700-3
info-kr@sensirion.com
www.sensirion.co.kr
Sensirion China Co. Ltd.
phone: +86 755 8252 1501
info-cn@sensirion.com
www.sensirion.com.cn
Sensirion Taiwan Co. Ltd.
info@sensirion.com
www.sensirion.com
To find your local representative, please visit www.sensirion.com/contact

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